Towards VLSI photonics with PDK: tolerances, sensitivity, yield

Process Design Kits are enabling the access to generic photonic foundries according to the scheme of multiple projects wafer. Here we show the importance to include also statistical data to evaluate the effects of production process fluctuations on the response of photonic integrated circuits. Sensitivity analysis by M and Sobol indices allow to measure the impact of random parameters on the transfer function variability, estimate the yield and achieve a robust and reliable design.