The present invention relates to a micro-electromechanical sensor (MEMS) with a dielectric proof mass and a detection method which uses a micro-electromechanical sensor. The MEMS sensor uses a conductive proof mass movable inside a set of fixed electrodes. The mass displacement is detected as a change in capacitance between its movable electrodes and a set of fixed electrode. The present invention uses a non-conductive or dielectric mass (e.g. intrinsic semiconductors, or non-conductive material of the microelectronics industry). The mass movement inside a series of fixed electrodes connected appropriately produces a capacitance change proportional to the movement of the mass itself and proportional to the dielectric constant of the mass material. The advantages of the new transduction technique are mainly: - increased sensitivity of the device; - high pull-in voltage (maximum voltage applied between the electrodes); - improved linearity; - reduction of the device area. The industrialization of the invention is the same as for other MEMS sensors with modifications to the manufacturing process Thelma.

Microelectromechanical sensor with non-conductive sensing mass, and method of sensing through a microelectromechanical sensor

CORIGLIANO, ALBERTO;
2012-01-01

Abstract

The present invention relates to a micro-electromechanical sensor (MEMS) with a dielectric proof mass and a detection method which uses a micro-electromechanical sensor. The MEMS sensor uses a conductive proof mass movable inside a set of fixed electrodes. The mass displacement is detected as a change in capacitance between its movable electrodes and a set of fixed electrode. The present invention uses a non-conductive or dielectric mass (e.g. intrinsic semiconductors, or non-conductive material of the microelectronics industry). The mass movement inside a series of fixed electrodes connected appropriately produces a capacitance change proportional to the movement of the mass itself and proportional to the dielectric constant of the mass material. The advantages of the new transduction technique are mainly: - increased sensitivity of the device; - high pull-in voltage (maximum voltage applied between the electrodes); - improved linearity; - reduction of the device area. The industrialization of the invention is the same as for other MEMS sensors with modifications to the manufacturing process Thelma.
2012
Microsystems; MEMS; Non conductive sensing mass
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/762260
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