The present invention relates to an improved detection structure for a resonant accelerometer with vertical axis (so-called "z-axis"), of a MEMS (microelectromechanical system) or NEMS (nanoelectromechanical system) type, in particular one capable of detecting with high electrical performance a component of vertical acceleration, acting in a direction transverse with respect to, or out of, a plane of a main extension of the same structure.
Improved detection structure for a z-axis resonant accelerometer
COMI, CLAUDIA;CORIGLIANO, ALBERTO;
2012-01-01
Abstract
The present invention relates to an improved detection structure for a resonant accelerometer with vertical axis (so-called "z-axis"), of a MEMS (microelectromechanical system) or NEMS (nanoelectromechanical system) type, in particular one capable of detecting with high electrical performance a component of vertical acceleration, acting in a direction transverse with respect to, or out of, a plane of a main extension of the same structure.File in questo prodotto:
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