This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geometrical setting is optimized in order to improve the sensitivity and the linearity of the sensor while keeping its dimensions very small. The accelerometer, fabricated by the THELMA surface micro-machining process of STMicroelectronics, constitutes a further step of a research leading to the design of in-plane and out-of-plane resonant micro accelerometers.
A new out-of-plane resonant micro accelerometer
COMI, CLAUDIA;CORIGLIANO, ALBERTO;
2011-01-01
Abstract
This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geometrical setting is optimized in order to improve the sensitivity and the linearity of the sensor while keeping its dimensions very small. The accelerometer, fabricated by the THELMA surface micro-machining process of STMicroelectronics, constitutes a further step of a research leading to the design of in-plane and out-of-plane resonant micro accelerometers.File in questo prodotto:
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