When significantly displacing a proof mass, the nonlinear hardening characteristic of the supporting beams becomes visible. Thus, the resonance peak of the structure is no longer vertical but bends towards the higher frequencies. This property is useful to easily synchronise sense and drive resonances thus increasing the sensibility of the MEMS device. Through a test structure designed to investigate the high deformation range of the supporting beams, its nonlinear vibrations were investigated both experimentally and numerically.

Non linear Vibrations of a MEMS translational device

BRAGHIN, FRANCESCO;LEO, ELISABETTA;RESTA, FERRUCCIO
2005-01-01

Abstract

When significantly displacing a proof mass, the nonlinear hardening characteristic of the supporting beams becomes visible. Thus, the resonance peak of the structure is no longer vertical but bends towards the higher frequencies. This property is useful to easily synchronise sense and drive resonances thus increasing the sensibility of the MEMS device. Through a test structure designed to investigate the high deformation range of the supporting beams, its nonlinear vibrations were investigated both experimentally and numerically.
2005
Proceedings of 2005 PhD Research in Microelectronics and Electronics
0780393457
9780780393455
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/274479
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